Broad bandwidth interferometric gauging system

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356363, G01B 902

Patent

active

046066390

ABSTRACT:
An optical gauging system comprises a fixture for rotating a workpiece to provide registration of the workpiece surfaces with a measurement optical path and optical interference apparatus for reflecting a measurement optical beam off said surfaces to provide an optical interference signal indicative of the distance between successive surfaces.

REFERENCES:
patent: 908725 (1909-01-01), Ashley
patent: 1901632 (1933-03-01), Chamberlain
patent: 2604004 (1952-07-01), Root
patent: 2666267 (1954-01-01), Root
patent: 3741659 (1973-06-01), Jones, Jr.

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