Broad band surface acoustic wave edge deposited transducer

Details Broad band surface acoustic wave edge deposited transducer Broad band surface acoustic wave edge deposited transducer

1982-09-24

1984-05-08

Miller, J. D.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313A, 333141, 333150, 357 26, H01L 3116

Patent

active

044477546

ABSTRACT:
A broad band surface acoustic wave (SAW) device has an edge-deposited transducer (EDT) capable of frequencies in excess of 1 GHz and bandwidths in the hundreds of MHz. The device includes a transducer on a semiconductor substrate which is either non-piezoelectric or weakly piezoelectric. The substrate has a sharp, smooth edge formed by the intersection of its top and a side surface. The transducer includes a passivation layer deposited on the side surface of the substrate and a starter layer deposited on the passivation layer; an inner metallic (gold, for example) electrode deposited on the starter layer; a transducer layer deposited on the inner metallic electrode; and an outer metallic electrode deposited on the transducer layer. The outer electrode is formed on the transducer layer one-fifth wavelength below the top surface of the substrate. When the transducer is excited, bulk longitudinal waves are generated in the transducer layer which couple to the longitudinal component of the surface wave in the substrate causing the SAW mode to propagate away from the transducer.

REFERENCES:
patent: 3935564 (1976-01-01), Quate et al.
patent: 4019200 (1977-04-01), Adkins et al.
patent: 4211948 (1980-07-01), Smith et al.
patent: 4288775 (1981-09-01), Bennewitz et al.
Bowers et al., "Design of High Efficiency Wideband SAW Edge Bonded Transducers", '78 Ultrasonic Symposium, 25-27, Sep. '78, pp. 744-748.
Oates, et al., "LiNBO.sub.3 SAW Edge-Bonded Transducers on ST Quartz and <001> Cut GaAs".

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