Broad band referencing reflectometer

Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Reexamination Certificate

active

07391030

ABSTRACT:
A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

REFERENCES:
patent: 3091154 (1963-05-01), Hall
patent: 3160752 (1964-12-01), Bennett
patent: 3572951 (1971-03-01), Rothwarf et al.
patent: 3825347 (1974-07-01), Kaiser
patent: 4368983 (1983-01-01), Bennett
patent: 4899055 (1990-02-01), Adams
patent: 4984894 (1991-01-01), Kondo
patent: 5042949 (1991-08-01), Greenberg et al.
patent: 5120966 (1992-06-01), Kondo
patent: 5182618 (1993-01-01), Heinonen
patent: RE34783 (1994-11-01), Coates
patent: 5607800 (1997-03-01), Ziger
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 5771094 (1998-06-01), Carter
patent: 5781304 (1998-07-01), Kotidis et al.
patent: 5798837 (1998-08-01), Aspnes et al.
patent: 5880831 (1999-03-01), Buermann et al.
patent: 5900939 (1999-05-01), Aspnes et al.
patent: 5903351 (1999-05-01), Jeong et al.
patent: 5917594 (1999-06-01), Norton
patent: 5991022 (1999-11-01), Buermann et al.
patent: 6128085 (2000-10-01), Buermann et al.
patent: 6129807 (2000-10-01), Grimbergen et al.
patent: 6181427 (2001-01-01), Yarussi et al.
patent: 6184984 (2001-02-01), Lee
patent: 6261853 (2001-07-01), Howell et al.
patent: 6278519 (2001-08-01), Rosencwaig et al.
patent: 6297880 (2001-10-01), Rosencwaig et al.
patent: 6304326 (2001-10-01), Aspnes et al.
patent: 6313466 (2001-11-01), Olsen et al.
patent: 6411385 (2002-06-01), Aspnes et al.
patent: 6414302 (2002-07-01), Freeouf
patent: 6417921 (2002-07-01), Rosencwaig et al.
patent: 6580510 (2003-06-01), Nawracala
patent: 6665075 (2003-12-01), Mittleman et al.
patent: 6710865 (2004-03-01), Forouhi et al.
patent: 6765676 (2004-07-01), Buermann
patent: 6897456 (2005-05-01), Hasegawa et al.
patent: 7026626 (2006-04-01), Harrison
patent: 7061614 (2006-06-01), Wang et al.
patent: 7067818 (2006-06-01), Harrison
patent: 7095511 (2006-08-01), Chalmers et al.
patent: 7126131 (2006-10-01), Harrison
patent: 7189973 (2007-03-01), Harrison
patent: 2001/0055118 (2001-12-01), Nawracala
patent: 2002/0030826 (2002-03-01), Chalmers et al.
patent: 2002/0149774 (2002-10-01), McAninch
patent: 2002/0154302 (2002-10-01), Rosencwaig
patent: 2003/0071996 (2003-04-01), Wang et al.
patent: 2004/0150820 (2004-08-01), Nikoonahad et al.
patent: 2005/0002037 (2005-01-01), Harrison
patent: 2005/0036143 (2005-02-01), Huang
patent: 2006/0192958 (2006-08-01), Harrison
patent: 2007/0030488 (2007-02-01), Harrison
McPherson Product Brochure “Reflectometer for Sample Analysis,” McPherson, Inc., Massachusetts, Published Prior to Sep. 23, 2003, 1-2 pps.
McPherson Product Brochure “Spectral Reflectometer,” McPherson, Inc., Massachusetts, Nov. 12, 2001, 1 pg.
McPherson Product Brochure “VUVaS Spectrophotometers for 115 nm to >380 nm,” McPherson, Inc., Massachusetts, Published Prior to Sep. 23, 2003, 1-4 pps.
McPherson Product Brochure “VUVaS Spectrophotometers, Made to Measure 115-380 nm,” McPherson, Inc., Massachusetts, Published Prior to Sep. 23, 2003, 1-8 pps.
Acton Research Product Brochure “Acton Research Purged CAMS Optical Measurement System,” Acton Research Corporation, Massachusetts, Published Prior to Sep. 23, 2003, 1-2 pps.
“The Thin Film tool for next generation lithography at 157nm,” Web page from http://www.sopra-sa.com, Sopra, Printed From Internet On Feb. 19, 2002, 1 pg.
“SE and GXR combined on the same instrument,” Web page from http://www.sopra-sa.com, Sopra, Printed From Internet on Feb. 19, 2002, 1 pg.
“The ideal Thin Film characterization unit for Development and Pilot Line environment,” Web page from http://www.sopra-sa.com, Sopra, Printed From Internet on Feb. 19, 2002, 1 pg.
“VUV-VASE™, The Award Winning VUV-VASE™ is the latest addition to our line of Spectroscopic Ellipsometers,” Web pages from http://www.jawoolam.com, J.A. Woollam Company, Nebraska, Printed From Internet on Nov. 5, 2002, 1-2 pps.
“Vacuum UV Spectroscopic Ellipsometers,” Web pages from http://www.sentech.de, Sentech Instruments, Printed From Internet on Feb. 20, 2002, 1-3 pps.
Search Report;PCT/US04/30859; 13 pgs.
Rubloff, “Surface Reflectance Spectroscopy System”, Technical Disclosure, Ip.com, www.ip.com, May 1, 1977, 5 pgs.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Broad band referencing reflectometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Broad band referencing reflectometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Broad band referencing reflectometer will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2798679

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.