Broad band optical reduction system using matched multiple refra

Details Broad band optical reduction system using matched multiple refra Broad band optical reduction system using matched multiple refra

1992-02-06

1993-05-18

Arnold, Bruce Y.

Optical: systems and elements

Polarization without modulation

Polarizarion by dichroism

359495, 359727, 359728, 359732, G02B 1708, G02B 2728

Patent

active

052125939

ABSTRACT:
A broad band catadioptric optical reduction system using refractive elements made of different types of glass matched for color correction over a broad band width. A combination of fused silica and crown glass is used. An aspheric mirror is used for improved aberration correction. The optical system is adapted for use in lithography for semiconductor manufacturing in the I-line and is capable of 0.5 micron resolution at a wavelength of 365 nanometers.

REFERENCES:
patent: 3698808 (1972-10-01), Delmas
patent: 3753608 (1973-08-01), Bernal
patent: 4953960 (1990-09-01), Williamson
patent: 5089913 (1992-02-01), Singh et al.

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