Broad band DUV, VUV long-working distance catadioptric...

Details Broad band DUV, VUV long-working distance catadioptric... Broad band DUV, VUV long-working distance catadioptric...

2005-01-11

2005-01-11

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S365000, C359S656000

Reexamination Certificate

active

06842298

ABSTRACT:
A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working distance, and a large field of view is presented. The objective is preferably telecentric. The design is ideally suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths in the UV to VUV spectral range.

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