Broad-band antireflection coating having four sputtered layers

Details Broad-band antireflection coating having four sputtered layers Broad-band antireflection coating having four sputtered layers

1997-12-31

2000-06-13

Turner, Archene

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

359580, 359586, 359587, 359588, 428216, 428697, 428699, 428701, 428702, B32B 700

Patent

active

060747307

ABSTRACT:
A broad-band multilayer antireflection coating comprising four layers designed for deposition in an inline magnetron sputtering machine. The optical thickness of the third layer from the substrate is less than one quarter of a wavelength in the center of the low-reflection band, and the second and fourth layers are made of silicon dioxide.

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