Severing by tearing or breaking – Breaking or tearing apparatus – Combined with preliminary weakener or with nonbreaking cutter
Reexamination Certificate
2005-05-17
2005-05-17
Ashley, Boyer D. (Department: 3724)
Severing by tearing or breaking
Breaking or tearing apparatus
Combined with preliminary weakener or with nonbreaking cutter
C225S103000, C225S093000, C125S023010, C083S879000
Reexamination Certificate
active
06892917
ABSTRACT:
A brittle material rotating and aligning mechanism including a bearing, a rotary table, and a driving mechanismU, and installed in the worktable of a brittle material scribing and breaking apparatus; carries brittle material, for example, a semiconductor wafer for scribing and breaking into individual dies. The driving mechanism uses a flexible transmission member to rotate the rotary table for low installation cost, no requirement for a precision adjustment during installation, and, preventing the occurrence of back lash or the production of particles due to friction between the transmission member and the driving wheel of the driving mechanism, or between the transmission member and the rotary table.
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Chen Kuei-Jung
Chiang Chin-Chong
Ashley Boyer D.
Industrial Technology Research Institute
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