Organic compounds -- part of the class 532-570 series – Organic compounds – Oxygen containing
Reexamination Certificate
2006-11-21
2006-11-21
Keys, Rosalynd (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Oxygen containing
C568S669000, C568S670000, C526S072000, C549S417000, C528S401000, C528S402000, C430S311000
Reexamination Certificate
active
07138550
ABSTRACT:
Disclosed herein is a fluorinated bridged carbocyclic compound that can be polymerized by itself or with at least one other ethylenically unsaturated monomer to provide a polymer. The polymer may be used, for example, within a sub-300 nm photoresist composition. Also disclosed is a method to make the bridged carbocyclic compound.
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Abdourazak Atteye Houssein
Carr Richard Van Court
Markley Thomas John
Marsella John Anthony
Air Products and Chemicals Inc.
Boyer Michael K.
Keys Rosalynd
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