Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1990-08-03
1993-06-01
James, Andrew J.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
257659, 257415, H01L 2984
Patent
active
052164900
ABSTRACT:
A bridge electrode structure and method of fabrication thereof is provided that is adapted to provide electrically isolated metal bridges over the active portions of a monolithic micromechanical transducer. The bridge electrode of the invention is also adapted to operate in facing relationship with one or more buried electrodes, providing top-to-bottom symmetry for balanced application of forces, or motion detection when used in conjunction with transducer elements. The transducer, typically a gyroscope or an accelerometer, includes a semiconductor substrate and active elements etched out of the substrate, the active elements including flexure-supported transducer plates. The bridge electrodes are anchored at opposing points on the substrate's surface to metal layers used to facilitate their electro-forming. The central portions of the bridge are electroplated over an insulating spacer, such as a photoresist layer.
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Bernstein Jonathan J.
Greiff Paul
Bowers Courtney A.
Charles Stark Draper Laboratory, Inc.
James Andrew J.
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