Box cleaner for cleaning wafer shipping box

Details Box cleaner for cleaning wafer shipping box Box cleaner for cleaning wafer shipping box

2011-07-12

2011-07-12

Stinson, Frankie L (Department: 1711)

Cleaning and liquid contact with solids

Apparatus

For work having hollows or passages

C134S171000, C134S186000

Reexamination Certificate

active

07976642

ABSTRACT:
The present invention relates to a box cleaner including an ultrasonic cleaning bath having a receiving space to be filled with DIW and an ultrasonic wave generator arranged at a bottom thereof; a tray for loading a wafer shipping box thereon; a lift for providing a driving force to put the tray into the ultrasonic cleaning bath and take the tray out of the ultrasonic cleaning bath; and a drying system for drying the cleaned shipping box, wherein a gas sprayer is installed in the ultrasonic cleaning bath for spraying gas into the cleaned shipping box to push the DIW out of the shipping box, thereby draining the DIW.

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