Boundary acoustic wave device

Details Boundary acoustic wave device Boundary acoustic wave device

2006-12-19

2006-12-19

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S31300R

Reexamination Certificate

active

07151424

ABSTRACT:
A boundary acoustic wave device includes a first boundary acoustic wave element, and a second boundary acoustic wave element disposed on the first boundary acoustic wave element. Each boundary acoustic wave element includes a first solid layer made of a piezoelectric material, a second solid layer made of one of a piezoelectric material and an insulating material, and disposed on the first solid layer, and a boundary acoustic wave exciting interdigital transducer arranged in the boundary between the first and second solid layers.

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M. Yamaguchi et al., “Highly Piezoelectric Boundary Waves in Si/SiO2/LiNbO3Structure”, 1998 IEEE International Frequency Control Symposium, May 27-29, 1998, pp. 484-488.
Yamashita Takashi et al.; “Highly Piezoelectric Boundary Method in Si/Si/O3/LiNbO3Structural Propagation”; 26thEM Symposium, May 1997; pp. 53-58.

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