Boundary acoustic wave device

Details Boundary acoustic wave device Boundary acoustic wave device

2011-03-08

2011-03-08

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R

Reexamination Certificate

active

07902718

ABSTRACT:
A boundary acoustic wave device includes a LiNbO3substrate having a plurality of grooves provided in the upper surface thereof, electrode layers which are defined by a metal material filled in the grooves and which include IDT electrodes, and a dielectric layer, such as a SiO2layer, provided over the upper surface of the piezoelectric substrate and the electrodes. The upper surface of the dielectric layer is flat or substantially flat. The thickness of the electrodes, θ of the Euler angles (0°, θ, −45° to +45°) of the LiNbO3substrate, and the thickness of the dielectric layer are within any of the ranges shown in Table 1.

REFERENCES:
patent: 7322093 (2008-01-01), Kadota et al.
patent: 7550898 (2009-06-01), Kadota et al.
patent: 7581306 (2009-09-01), Kadota et al.
patent: 7688161 (2010-03-01), Miura et al.
Kadota et al., “Boundary Acoustic Wave Device”; U.S. Appl. No. 12/420,944, filed Apr. 9, 2009.

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