Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-02-13
2007-02-13
Thompson, Timothy (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S291000
Reexamination Certificate
active
11144842
ABSTRACT:
A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.
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Huber Avigdor
Krylov Slava
Lalezar Ronen
Medina Moshe
Friedman Mark M.
Terraop Ltd.
Thompson Timothy
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