Bottom loading wafer carrier box

Special receptacle or package – For a vehicle

Patent

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Details

206328, 206454, 206521, 206453, B65D 8530, B65D 8100, B65D 5700

Patent

active

046840214

ABSTRACT:
A bottom loading wafer carrier box provides a cavity which appropriately may have a still and particulate free environment for a wafer carrier handling silicon wafers during their storage,transport, and transfer into and out of processing equipment for the manufacture of semiconductors. The box includes a housing enclosing the cavity with an open bottom suitable for receiving the wafer carrier into the cavity. A releaseable door is provided for sealing the open bottom from the ambient environment about the housing of the box. A cam bar is slideably connected to the outside of the housing and operably connected to a moveable slider extending within the cavity. The slider has a carrier catch adapted for retaining the wafer carrier within the cavity and a cushion to retain the wafers within the carrier and to reduce the effects of shock upon the wafers. A grippable handle suitably extends from the cam bar so that the handle is operably connected to the slider to manually actuate engagement of the catch with the carrier and the cushion with the wafers.

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Geany et al., "Self-Sealing Shake-Proof Carrier" IBM Tech Disclosure Bulletin, vol. 19, No. 6, 11/1976, p. 2070.
Proposal for Standard Spec. for SMIF, 9/4/84.
"SMIF: A Technology for Wafer Cassette Transfer in VLSI Manufacturing" Parihl et al 12/1985.
"Critical Issues for VLSI Manufacturing," 12/1985.
SMIF and its Impact on Cleanroom Automation, Gunzwardena et al, 9/1985.

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