Borosilicate electronic coatings

Details Borosilicate electronic coatings Borosilicate electronic coatings

1993-03-25

1999-06-15

Bell, Janyce

Coating processes

Heat decomposition of applied coating or base material

427 79, 427 96, 427162, 427377, B05D 302

Patent

active

059120479

ABSTRACT:
A borosilicate containing coating is formed on an electronic substrate by applying a borosilazane polymer on the substrate and converting it to borosilicate by heating in an oxidizing environment. The resultant thick planarizing coatings are useful as protective coatings and dielectric inner layers.

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