Boron hydride polymer coated substrates

Stock material or miscellaneous articles – Composite – Of quartz or glass

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376151, 376916, 427 6, 427 39, 428704, B05D 306

Patent

active

047013796

ABSTRACT:
A method is disclosed for coating a substrate with a uniformly smooth layer of a boron hydride polymer. The method comprises providing a reaction chamber which contains the substrate and the boron hydride plasma. A boron hydride feed stock is introduced into the chamber simultaneously with the generation of a plasma discharge within the chamber. A boron hydride plasma of ions, electrons and free radicals which is generated by the plasma discharge interacts to form a uniformly smooth boron hydride polymer which is deposited on the substrate.

REFERENCES:
patent: 3565683 (1971-02-01), Morelock
patent: 4029045 (1977-06-01), Cielaszyk et al.
patent: 4091166 (1978-05-01), Kubacki
patent: 4266506 (1981-05-01), Miller
patent: 4323420 (1982-04-01), Masnari et al.
Letts et al., "J. Vac. Sci. Technol", vol. 19, No. 3, Sep./Oct. 1981, pp. 739-742.

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