Boron-aluminum nitride coating and method of producing same

Details Boron-aluminum nitride coating and method of producing same Boron-aluminum nitride coating and method of producing same

1995-11-30

1998-06-16

Speer, Timothy

Stock material or miscellaneous articles

Composite

Of inorganic material

428336, 428432, 428446, 428697, 428700, 428701, 428702, B32B 1700

Patent

active

057667837

ABSTRACT:
Boron-aluminum nitride B.sub.x Al.sub.1-x N.sub.y (0.001.ltoreq.x.ltoreq.0.70, 0.85.ltoreq.y.ltoreq.1.05) films having wurtzite type structure are proposed. The material has higher hardness, higher sound velocity and wider band gap than hexagonal aluminum nitride (AlN).

REFERENCES:
patent: 3922475 (1975-11-01), Manasevit
patent: 4731303 (1988-03-01), Hirano et al.
patent: 4892791 (1990-01-01), Watanabe
patent: 5503912 (1996-04-01), Setoyama et al.
patent: 5571603 (1996-11-01), Utumi

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