Photocopying – Projection printing and copying cameras – Identifying – composing – or selecting
Patent
1985-03-11
1986-03-25
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Identifying, composing, or selecting
355 45, 355 53, G03B 2752, G03B 2770
Patent
active
045779570
ABSTRACT:
A projection lens and a source of illumination and exposure light are employed for projecting an image of a reticle onto a first reference mark or a semiconductive wafer, both of which are movably supported in the image plane of the projection lens. Optical apparatus, including an objective lens unit and an imaging lens, is provided for imaging light from the source of illumination and exposure light at the reticle and for reimaging reflected light from the semiconductive wafer at the objective lens unit. Additional optical apparatus, including a source of nonexposure light, is provided and is operable with the projection lens for imaging a second adjustable reference mark onto the first reference mark or the semiconductive wafer to facilitate use of the projection lens in aligning a semiconductive wafer covered with a photoresist opaque to exposure light.
REFERENCES:
patent: 3192844 (1965-07-01), Szasz et al.
patent: 3461566 (1969-08-01), Gerstner
patent: 3476476 (1969-11-01), Chitayat
patent: 3610750 (1971-10-01), Lewis et al.
patent: 3685117 (1972-08-01), Wing et al.
patent: 3704946 (1972-12-01), Brault et al.
patent: 3716296 (1973-02-01), Springer et al.
patent: 3853398 (1974-12-01), Kano
patent: 3876301 (1975-04-01), Kosugi
patent: 3917399 (1975-11-01), Buzawa et al.
patent: 3940211 (1976-02-01), Johannsmeier
patent: 3984186 (1976-10-01), Momose et al.
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4040736 (1977-08-01), Johannsmeier
patent: 4057347 (1977-11-01), Moriyama et al.
patent: 4110762 (1978-08-01), Tigreat
patent: 4128331 (1978-12-01), Nakamura
patent: 4311390 (1982-01-01), Phillips
patent: 4362389 (1982-12-01), Koizumi et al.
patent: 4367046 (1983-01-01), Lacombat
patent: 4414749 (1983-11-01), Johannsmeier
patent: 4422755 (1983-12-01), Phillips
patent: 4437758 (1984-03-01), Suzuki
patent: 4452526 (1984-06-01), Johannsmeier et al.
patent: 4473293 (1984-09-01), Phillips
Eaton-Optimetrix Inc.
Griffin Roland I.
Wintercorn Richard A.
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