Stock material or miscellaneous articles – Composite – Of b – n – p – s – or metal-containing material
Reexamination Certificate
2003-09-26
2009-12-01
Zimmer, Marc S (Department: 1796)
Stock material or miscellaneous articles
Composite
Of b, n, p, s, or metal-containing material
C428S447000, C428S448000, C528S025000, C528S031000
Reexamination Certificate
active
07625642
ABSTRACT:
Interlayer insulating films5,7(insulating films) provided in a memory capacitor cell8are formed between a gate electrode3and a counter electrode8C formed on a silicon wafer1.The interlayer insulating films5,7comprise a borazine-based resin, having a specific dielectric constant of no greater than 2.6, a Young's modulus of 5 GPa or greater and a leak current of no greater than 1×10−8A/cm2.
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Abe Koichi
Kaji Makoto
Matsutani Hiroshi
Uchimaru Yuko
Antonelli, Terry Stout & Kraus, LLP.
Hitachi Chemical Co., Ltd
National Institute of Advanced Industrial Science and Technology
Zimmer Marc S
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