Bonding tool, production and handling thereof

Metal fusion bonding – Including means to force or clamp work portions together... – Work portion comprises electrical component

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Details

22818021, 451 53, 451 55, H01L 21603, B24B 100

Patent

active

054254914

ABSTRACT:
A bonding tool capable of uniformly pressing all electrodes of a semiconductor element and surely bonding all the electrodes and leads, even if the end pressing surface of a tool end part of a bonding tool is enlarged with the large-sized and long-sized tendency of semiconductor elements, is provided in which an end pressing surface of a tool end part fitted to a shank is composed of a hard material, characterized in that the end pressing surface is gradually curved to form a concave surface from the peripheral part to the central part at an application temperature of the bonding tool and the degree of flatness of the concave end pressing surface is in the range of 1 to 5 .mu.m at the application temperature of the bonding tool.

REFERENCES:
patent: 2460312 (1949-02-01), Scherer
patent: 5197651 (1993-03-01), Nakamura et al.
patent: 5213248 (1993-05-01), Horton et al.

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