Metal fusion bonding – Including means to force or clamp work portions together... – Work portion comprises electrical component
Patent
1994-09-20
1996-05-14
Ramsey, Kenneth J.
Metal fusion bonding
Including means to force or clamp work portions together...
Work portion comprises electrical component
228 54, 427249, H01L 2158
Patent
active
055160271
ABSTRACT:
A bonding tool has a head portion made essentially of vapor-deposited diamond, wherein a principal diamond crystal plane forming a head face is a (111) plane. Such a head face has high hardness and a good wear resistance. In order to improve the toughness of a bonding head which is mainly made of vapor-deposited diamond, a portion or ply forming the head face consists essentially of high-purity diamond, and another portion or ply supporting the head face consists essentially of low-purity diamond. The head face has a high rigidity, while the portion supporting the head face has a high toughness. In order to provide a bonding head portion which is mainly made of vapor-deposited diamond with electrical conductivity, a first portion or ply forming a head face consists essentially of polycrystalline diamond containing a relatively small amount of dopant, and another portion or ply supporting the first portion or ply contains a large amount of dopant. The head portion having electrical conductivity can be heated by energization. In a tool employing a coating containing vapor-deposited diamond as a bonding head portion, the coating is formed by a compound of a metal or ceramics and vapor-deposited diamond, in order to improve the strength of the coating and adhesion to a tool substrate.
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Fujimori Naoji
Ikegaya Akihiko
Takahashi Toshiya
Tanabe Keiichiro
Fasse W. F.
Fasse W. G.
Ramsey Kenneth J.
Sumitomo Electric Industries Ltd.
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