Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor
Reexamination Certificate
2011-05-17
2011-05-17
Aftergut, Jeff H (Department: 1746)
Adhesive bonding and miscellaneous chemical manufacture
Methods
Surface bonding and/or assembly therefor
C156S281000
Reexamination Certificate
active
07942994
ABSTRACT:
A bonding tool and method A bonding tool and method for bonding together layers of a MEMS transducer device, including at least one layer of a piezoelectric material, and an intermediate reinforcing layer of titanium, or other metal, comprising: positioning the layers above one another and spaced apart by means of spacing members, heating said layers to a bonding temperature, and retracting the spacing members so as to bring the layers together under pressure to effect a bond between adjacent surfaces of the layers, wherein a press head is employed with a compliant caul for evenly distributing the press force; and permitting said layers to cool to an operating temperature in which said piezoelectric layer is under compressive strain and the titanium layer is under tensile strain.
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Hucker Martyn John
Warsop Clyde
Aftergut Jeff H
BAE Systems plc
Buchanan & Ingersoll & Rooney PC
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