Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Thinning of semiconductor substrate
Reexamination Certificate
2006-11-27
2010-12-14
Smith, Bradley K (Department: 2894)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
Thinning of semiconductor substrate
C257S618000
Reexamination Certificate
active
07851331
ABSTRACT:
A semiconductor structure includes a first substrate and a second substrate bonded over the first substrate. The first substrate includes a passivation layer formed over the first substrate. The passivation layer includes at least one first opening exposing a first bonding pad formed over the first substrate. The second substrate includes at least one second opening aligned with and facing the first opening.
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Chen Chen-Shien
Lii Mirng-Ji
Lu Szu Wei
Tzou Jerry
Wu Hua-Shu
Duane Morris LLP
Smith Bradley K
Taiwan Semiconductor Manufacturing Co. Ltd.
Tran Tony
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