Bonding of sputtering target by variable polarity plasma arc wel

Details Bonding of sputtering target by variable polarity plasma arc wel Bonding of sputtering target by variable polarity plasma arc wel

1996-03-20

1998-07-21

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912116, 21912158, 21912159, B23K 1000

Patent

active

057837953

ABSTRACT:
A reusable aluminum sputter target support tube which is bonded to a replaceable sputter target by variable polarity plasma arc welding and a method of manufacturing such reusable sputtering target assemblies.

REFERENCES:
patent: 5070228 (1991-12-01), Sieners et al.
patent: 5409590 (1995-04-01), Hurwitt et al.
patent: 5466905 (1995-11-01), Flowers et al.
patent: 5471301 (1995-11-01), Dailey et al.
patent: 5556559 (1996-09-01), Bjorkman, Jr. et al.
Ian D. Harris, "Plasma Arc Welding" American Society of Metals, Welding Handbook, pp. 195-199.

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