Bonding apparatus and testing apparatus of a bonded portion

Details Bonding apparatus and testing apparatus of a bonded portion Bonding apparatus and testing apparatus of a bonded portion

1992-09-18

1994-06-28

Heinrich, Samuel M.

Metal fusion bonding

Process

With condition responsive, program, or timing control

2281805, 228 45, 228 9, H01L 2160

Patent

active

053239520

ABSTRACT:
A bonding apparatus comprising a bonding tool, means for driving the bonding tool, means for detecting an amount of crushing of a bonding portion during bonding, means for calculating a rate of change of the amount of crushing detected by the amount-of-crushing detecting means, means for setting a target value, which is inputted from an external source, of the amount of crushing of the bonding portion, and means for controlling the driving means. When the rate of change of the amount of crushing calculated by the calculating means is smaller than a predetermined value, the controlling means compares the amount of crushing detected by the amount-of-crushing detecting means with the target value. When the amount of crushing detected by the amount-of-crushing detecting means is smaller than the target value, the controlling means discriminates that the bonding is being performed in a satisfactory manner and hence should be continued.

REFERENCES:
patent: 4603802 (1986-08-01), Kurtz et al.
patent: 4619396 (1986-10-01), Yamamoto
patent: 4789093 (1988-12-01), Bansemir
patent: 4817848 (1989-04-01), Gabaldon
patent: 4998664 (1991-03-01), Gibson et al.

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