Bonding apparatus

Details Bonding apparatus Bonding apparatus

1996-07-10

1997-02-18

Heinrich, Samuel M.

Metal fusion bonding

With means to juxtapose and bond plural workpieces

Plural discrete workpieces

228 447, 228 565, H01L 21603

Patent

active

056034466

ABSTRACT:
A bonding apparatus which includes a function of adjusting the height level of an upper limit of a bonding stage including a standard stroke cam which raises and lowers the bonding stage, a cam holder which rotatably supports one end of the standard stroke cam and moves in a horizontal direction, a standard stroke air cylinder which drives the cam holder in a horizontal direction, a roller which is installed on the standard stroke cam, a linear cam which is contacted by the roller of the standard stroke cam, and a motor used for moving the linear cam so that the position of contact with the roller of the standard stroke cam can be changed when the raised position of the bonding stage is adjusted.

REFERENCES:
patent: 3949925 (1976-04-01), Keizer et al.
patent: 3957185 (1976-05-01), Kauffman et al.
patent: 4940217 (1990-07-01), Takeshita
patent: 5205460 (1993-04-01), Sato et al.
patent: 5372292 (1994-12-01), Sato et al.

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