Bonding and sputtering target by variable polarity plasma arc we

Details Bonding and sputtering target by variable polarity plasma arc we Bonding and sputtering target by variable polarity plasma arc we

1998-02-17

2000-07-18

Paschall, Mark

Electric heating

Metal heating

By arc

21912145, 219 7616, B23K 1000

Patent

active

060910461

ABSTRACT:
A reusable aluminum sputter target support tube which is bonded to a replaceable sputter target by variable polarity plasma arc welding and a method of manufacturing such reusable sputtering target assemblies.

REFERENCES:
patent: 4739146 (1988-04-01), Lindlam et al.
patent: 5070228 (1991-12-01), Siemers et al.
patent: 5409590 (1995-04-01), Hurwitt et al.
patent: 5464958 (1995-11-01), Flowers et al.
patent: 5466905 (1995-11-01), Flowers et al.
patent: 5471031 (1995-11-01), Dailey et al.
patent: 5556559 (1996-09-01), Bjorkman, Jr. et al.
Ian D. Harris, Plasma Arc Welding, American Society of Metals, Welding Handbook p. 195-199.

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