Stock material or miscellaneous articles – Composite – Of metal
Reexamination Certificate
2007-07-31
2007-07-31
McNeil, Jennifer C. (Department: 1775)
Stock material or miscellaneous articles
Composite
Of metal
C427S252000
Reexamination Certificate
active
10639969
ABSTRACT:
An improved component for use in a deposition chamber is constructed from ceramic zirconia and a stabilizing compound. The zirconia is preferably in a partially stabilized form and is coated with a metallic layer such as thermally sprayed aluminum. The surface of the zirconia is roughened to improve adhesion between the zirconia and the aluminum. Alternatively, an intermediate layer may be deposed between the zirconia and the metallic layer to improve the bonding between the layers. The coated zirconia component resists flaking when covered with materials that are being deposited in the deposition chamber and, thus, reduces the likelihood that devices being constructed in the deposition chamber will be contaminated by loose particles.
REFERENCES:
patent: 5202008 (1993-04-01), Talieh et al.
patent: 5391275 (1995-02-01), Mintz
patent: 6087285 (2000-07-01), Oomichi et al.
patent: 6330801 (2001-12-01), Whelan et al.
patent: 6368410 (2002-04-01), Gorczyca et al.
patent: 6406598 (2002-06-01), Lee et al.
patent: 6428663 (2002-08-01), Mostovoy et al.
patent: 6472014 (2002-10-01), Matsuba
patent: 6517908 (2003-02-01), Thom
patent: 6534197 (2003-03-01), Noda et al.
patent: 2002/0018921 (2002-02-01), Yamada et al.
patent: 2002/0038690 (2002-04-01), Minato et al.
patent: 2004/0067392 (2004-04-01), Yamada et al.
patent: 60-223653 (1985-11-01), None
patent: 63-277061 (1988-11-01), None
www.m-w.com/dictionary/metallic (Merrium-Webster Online Dictionary).
Metals Handbook Desk Edition Online; ASM, 2002.
I. Birkby and R. Stevens; Applications of Zirconia Ceramics; Key Engineering Materials vols. 122-124 (1996) pp. 527-552.
Reed W. Rosenberg, Pentagon Technologies; Micromagazine.com; Increasing PVD tool Uptime and Particle Control with Twin-Wire-Arc Spray Coatings.
Frances Markel, Matthew Simpson, OH-Hun Kwon & Marc Abouaf; Saint-Gobain Industrial Ceramics, Inc.; Semiconductor Fabtec -Developments in Ceramics for Semiconductor Processing.
Ricolcol Rafael
Rymer Joseph Patrick
Baldwin Gordon R.
Kauget Harvey S.
McNeil Jennifer C.
Phelps Dunbar LLP
Tosoh SET, Inc.
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