Bolometer-type THz-wave detector

Details Bolometer-type THz-wave detector Bolometer-type THz-wave detector

2008-03-27

2010-06-22

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07741604

ABSTRACT:
In a micro-bridge structure in which a temperature detecting portion14(diaphragm) including a bolometer thin film7is supported by a supporting portion13in a state floated from a circuit substrate2, a reflective film3reflecting a THz wave is formed on the circuit substrate2, an absorbing film11absorbing the THz wave is formed on the temperature detecting portion14, and an optical resonance structure is formed by the reflective film3and the temperature detecting portion14. And a gap between the reflective film3and the temperature detecting portion14is set approximately ¼ of a wavelength of an infrared ray on the basis of the wavelength of the infrared ray (in a range of approximately 1.5 to 2.5 μm, for example), and a sheet resistance of the temperature detecting portion14is set in a range in which an absorptance of the THz wave becomes a predetermined value or above on the basis of the THz wave (in a range of approximately 10 to 100 Ω/sq.). By this arrangement, the absorptance of the THz wave is drastically improved while using the structure and manufacturing technique of a bolometer-type infrared detector.

REFERENCES:
patent: 5144149 (1992-09-01), Frosch
patent: 5288649 (1994-02-01), Keenan
patent: 6329655 (2001-12-01), Jack et al.
patent: 7557349 (2009-07-01), Oda et al.
patent: 2004/0200962 (2004-10-01), Ishikawa et al.

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