Bolometer-type infrared solid-state image sensor

Details Bolometer-type infrared solid-state image sensor Bolometer-type infrared solid-state image sensor

2007-06-19

2007-06-19

Gagliardi, Albert J. (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

10434065

ABSTRACT:
A bolometer-type infrared solid-state image sensor has a plurality of infrared detecting elements provided above the substrate, which has diaphragm spacing from the substrate and supported by beams. The diaphragm has a bolometer thin film, electrodes arranged on the both end of the bolometer thin film, an upper layer protective film and a lower layer protective film, which are formed so as to sandwich and cover said bolometer thin film and the electrodes, and concave or convex sections formed on said lower layer protective film. The bolometer thin film is formed on the sides of the concave or convex sections. The beams includes wiring material and insulating protective films surrounding the wiring material.

REFERENCES:
patent: 5698852 (1997-12-01), Tanaka et al.
patent: 5914488 (1999-06-01), Sone
patent: 6329696 (2001-12-01), Tanaka
patent: 6441368 (2002-08-01), Grinberg et al.
patent: 2-281703 (1990-11-01), None
patent: 8105794 (1997-12-01), None
patent: 2000-2585 (2000-01-01), None
patent: 2000 346704 (2000-12-01), None
patent: 2001-255203 (2001-09-01), None
patent: 2002-259798 (2002-09-01), None
patent: WO 00/37906 (2000-06-01), None
H. Wada et al., “Design and Performance of 256 × 256 Bolometer-Type Uncooled Infrared Detector”,SPIE, vol. 3379, Apr. 1998, pp. 90-100.

Affiliated with

Also associated with

Rating

Bolometer-type infrared solid-state image sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Bolometer-type infrared solid-state image sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Bolometer-type infrared solid-state image sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3875903