Body for keeping a wafer, heater unit and wafer prober

Details Body for keeping a wafer, heater unit and wafer prober Body for keeping a wafer, heater unit and wafer prober

2006-08-04

2009-02-24

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07495460

ABSTRACT:
A wafer holding body used for a wafer prober for testing a semiconductor wafer includes a chuck top having a conductive layer on a surface thereof and a support body supporting the chuck top. The support body has a base portion opposing the chuck top and a side portion extending from the perimeter of the base portion to the chuck top to support the chuck top. A cavity portion is formed between the chuck top and the base portion of the support body. A reflection plate is provided in the cavity portion. A heater unit and a wafer prober includes the wafer holding body.

REFERENCES:
patent: 1555268 (1925-09-01), Colby
patent: 5793019 (1998-08-01), Boyle et al.
patent: 6549026 (2003-04-01), DiBattista et al.
patent: 6740853 (2004-05-01), Johnson et al.
patent: 6761796 (2004-07-01), Srivastava et al.
patent: 2006/0098379 (2006-05-01), Otaka et al.
patent: 7-169824 (1995-07-01), None
patent: 9-63973 (1997-03-01), None
patent: 9-119868 (1997-05-01), None
patent: 2001-33484 (2001-02-01), None
patent: 2004-140347 (2004-05-01), None
Japanese Office Action, with English translation, issued in Japanese Patent Application No. JP 2005-227333, mailed Jul. 1, 2008.

Affiliated with

Also associated with

Rating

Body for keeping a wafer, heater unit and wafer prober does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Body for keeping a wafer, heater unit and wafer prober, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Body for keeping a wafer, heater unit and wafer prober will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4095590