Boatless point source evaporation method

Details Boatless point source evaporation method Boatless point source evaporation method

1981-06-30

1983-06-28

Lusignan, Michael R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 46, 427 50, 427 51, 427 91, 427250, B05D 302, B05D 306, B05D 314, B05D 512

Patent

active

043905714

ABSTRACT:
A vapor deposition method of coating substrates with a material involves evaporating the end of a wire or rod made of that same material. The end of the wire is inductively or radiantly heated to form a molten convex miniscus thereon which serves as the coating source for the substrates.

REFERENCES:
patent: 3499785 (1970-03-01), Van Amstel
patent: 3860444 (1975-01-01), Donckel
patent: 4061800 (1977-12-01), Anderson
patent: 4183975 (1980-01-01), Sidders
IBM Technical Disclosure Bulletin, vol. 19, No. 10, Mar. 1977, pp. 3852-3853, "Rod Feed Control".
IBM Technical Disclosure Bulletin, vol. 18, No. 10, Mar. 1976, p. 3413, "Rod Height Control for E-Beam Evaporation System".

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