Boat transfer and queuing furnace elevator and method

Details Boat transfer and queuing furnace elevator and method Boat transfer and queuing furnace elevator and method

1987-06-16

1989-10-10

Bucci, David A.

Material or article handling

Chamber of a type utilized for a heating function and...

Charging of chamber

B65G 2500, F27D 300

Patent

active

048727997

ABSTRACT:
A novel boat transfer and queuing furnace elevator and method includes an X, Z, and Y assembly movable between furnace processing tubes, a furnace loading island, and an operator work station. The X, Z, and Y assembly includes X, Z, and Y drive motors mounted in a region below the region defined by the operative transfer, queuing, loading, and unloading movement paths for preventing motor-produced pollutants from contaminating wafer-loaded boats. The X, Z, and Y assembly includes X, Z, and Y linkages having resilient members mounted along moving and mounting interfaces thereof for providing shock and vibration isolation. In one embodiment, the work station and furnace are arranged in-line, and in another embodiment the work station and furnace are arranged in laterally offset relation. In both embodiments, the X, Z, and Y assembly has a multi-mode operation capability that minimizes "dead time" between transfers and significantly improves system processing throughput.

REFERENCES:
patent: 990205 (1911-04-01), Britton
patent: 1383041 (1921-06-01), Verdy
patent: 3212649 (1965-10-01), Johnson et al.
patent: 3665148 (1972-05-01), Yasenchak et al.
patent: 3782565 (1974-01-01), Doran et al.
patent: 3883008 (1975-05-01), Castaldi
patent: 3934481 (1976-01-01), Foster
patent: 4075972 (1978-02-01), Yamawaki et al.
patent: 4358239 (1982-11-01), Dechantsreiter
patent: 4439146 (1984-03-01), Sugita
patent: 4468195 (1984-08-01), Sasaki et al.
patent: 4505630 (1985-03-01), Kaschner et al.
patent: 4507044 (1985-03-01), Hutchins et al.
patent: 4543059 (1985-09-01), Whang et al.

Affiliated with

Also associated with

Rating

Boat transfer and queuing furnace elevator and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Boat transfer and queuing furnace elevator and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Boat transfer and queuing furnace elevator and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1954016