Measuring and testing – Testing of apparatus
Patent
1994-04-28
1996-01-23
Raevis, Robert
Measuring and testing
Testing of apparatus
33522, E01C 2301
Patent
active
054857597
ABSTRACT:
A test fixture for a boat having a plurality of slots for holding wafers includes a base for fixedly holding a boat to be tested; a wafer simulator, which wafer simulator includes a plurality of wafers sized to properly seat in the plurality of slots in the boat; structure for moving the plurality of wafers of the wafer simulator wholly into and out of the plurality of slots in the boat; and structure determining whether the plurality of wafers is properly seated in the plurality of slots in the boat when the wafer simulator is moved wholly into the plurality of slots in the boat.
REFERENCES:
patent: 4598483 (1986-07-01), Kygar
patent: 4713551 (1987-12-01), Layman et al.
patent: 4993163 (1991-02-01), Possati et al.
patent: 5291025 (1994-03-01), Smith
Conboy Michael R.
Goff Gerald L.
Smith Michael D.
Advanced Micro Devices , Inc.
Raevis Robert
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