Boat test apparatus

Measuring and testing – Testing of apparatus

Patent

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Details

33522, E01C 2301

Patent

active

054857597

ABSTRACT:
A test fixture for a boat having a plurality of slots for holding wafers includes a base for fixedly holding a boat to be tested; a wafer simulator, which wafer simulator includes a plurality of wafers sized to properly seat in the plurality of slots in the boat; structure for moving the plurality of wafers of the wafer simulator wholly into and out of the plurality of slots in the boat; and structure determining whether the plurality of wafers is properly seated in the plurality of slots in the boat when the wafer simulator is moved wholly into the plurality of slots in the boat.

REFERENCES:
patent: 4598483 (1986-07-01), Kygar
patent: 4713551 (1987-12-01), Layman et al.
patent: 4993163 (1991-02-01), Possati et al.
patent: 5291025 (1994-03-01), Smith

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