Boat for the epitaxial growth of several layers from the liquid

Details Boat for the epitaxial growth of several layers from the liquid Boat for the epitaxial growth of several layers from the liquid

1981-04-16

1983-08-09

McIntosh, John P.

Coating apparatus

Immersion or work-confined pool type

With means to move tank or pool

118429, H01L 21208

Patent

active

043972608

ABSTRACT:
A boat for the epitaxial growth of several layers on a substrate includes reservoirs present over a slide in the boat, as well as substrates on a base plate in the boat. A fixedly arranged plate is placed between the base plate and the slide, which fixedly arranged plate and slide include communication windows for liquid solutions in the reservoirs to act on the substrates. Applications of this invention are epitaxial growth of several layers in general, and in particular, the manufacture of plates for opto-electronic semiconnector devices.

REFERENCES:
patent: 4013040 (1977-03-01), Horikoshi

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