Boat for the epitaxial growth from the liquid phase

Details Boat for the epitaxial growth from the liquid phase Boat for the epitaxial growth from the liquid phase

1981-02-25

1983-07-19

McIntosh, John P.

Coating apparatus

Immersion or work-confined pool type

Work-confined pool

118415, 118421, H01L 21208

Patent

active

043938060

ABSTRACT:
A boat for use in the epitaxial crystal growth of two layers on multiple substrates includes a structure where the substrates are located in a cavity in a support layer of the crucible structure, and a slide layer having two reservoirs is provided thereover. The two reservoirs contain the respective liquid solution for the two epitaxial layers to be provided, and the two reservoirs are respectively provided with the slide layer being the bottom layer of one reservoir and a removable sealing element being the bottom layer of the other reservoir. Upon moving the slide layer over the bottom supporting layer, the multiple substrates in the cavity are provided with liquid solutions to obtain epitaxial growth.

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