Boat for liquid phase epitaxial growth

Details Boat for liquid phase epitaxial growth Boat for liquid phase epitaxial growth

1986-09-08

1988-09-06

McIntosh, John P.

Coating apparatus

With treatment of coating material

By separation

118421, 118429, H01L 21208

Patent

active

047684631

ABSTRACT:
A solution for crystal growth reserved in an upper chamber is taken from an opening formed in a slider mounted between the upper chamber and a middle chamber, and flown to the middle chamber containing a substrate, solid bodies in the solution being removed by two grids attached to a hole provided on the side of the middle chamber.

REFERENCES:
patent: 3981764 (1976-09-01), Ito et al.
patent: 4574730 (1986-03-01), Svilans
patent: 4602592 (1986-07-01), Ganev
"Liquid Phase Epitaxy Technology of Large area AlGaAs/GaAs Wafers of GaAs Solar Cells for Space Application", Yoshida et al., The 17th IEEE Photovoltaic Specialists Conference Proceedings, pp. 42-45, May 1-4, 1984.

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