Boat for heat treatment and vertical heat treatment equipment

Details Boat for heat treatment and vertical heat treatment equipment Boat for heat treatment and vertical heat treatment equipment

2005-11-22

2005-11-22

Wilson, Gregory (Department: 3749)

Heating

Accessory means for holding, shielding or supporting work...

C432S258000

Reexamination Certificate

active

06966771

ABSTRACT:
The present invention is a boat for a thermal process including: a plurality of pillars; a plurality of claws formed in each of the pillars in a height direction at predetermined intervals; a plurality of supporting plates mounted in a tier-like manner between the plurality of pillars via the claws, each supporting plate having an object-to-be-processed mounting surface on which an object to be processed can be mounted; and a groove and a through hole provided in the object-to-be-processed mounting surface. According to the present invention, the groove and the through hole provided in the object-to-be-processed mounting surface form an air layer between the object-to-be-processed mounting surface of the supporting plate and the object to be processed, so that sticking of the object to be processed can be inhibited. Thus, even during a thermal process at a high temperature, generation of slip caused by the sticking of the object to be processed can be inhibited.

REFERENCES:
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patent: 6474987 (2002-11-01), Nakai et al.
patent: 6716027 (2004-04-01), Kim et al.
patent: 6796439 (2004-09-01), Araki
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International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP2002/009512.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP2002/009512.

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