Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1996-04-26
1998-05-05
Nguyen, Vinh P.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324754, G01R 3102
Patent
active
057479941
ABSTRACT:
A board exchange mechanism for a self-diagnosis process excludes the need of disconnecting a test head from a wafer prober for installing a self-diagnosis board. The board exchange mechanism for a semiconductor test system having a plurality of test channels includes: a test head connected to the semiconductor test system and having a plurality of print circuit boards corresponding to the plurality of test channels; a wafer prober having a pin card for electrically contacting a semiconductor wafer to be tested for supplying test signals to the semiconductor wafer; a performance board for interfacing the plurality of print circuit boards and the pin card when the test head and the wafer prober are mechanically connected with each other; a self-diagnosis board which is sized equal to the size of the pin card of the wafer prober; wherein the pin card is replaced with the self-diagnosis board prior to a self-diagnosis test while the test head and the wafer prober remain mechanically connected and wherein the performance board interfaces the plurality of print circuit boards and the self-diagnosis board.
REFERENCES:
patent: 3599092 (1971-08-01), Silverman
patent: 3665504 (1972-05-01), Silverman
patent: 4918374 (1990-04-01), Stewart et al.
patent: 5448164 (1995-09-01), Selley et al.
patent: 5489843 (1996-02-01), Erjavic et al.
Advantest Corp.
Nguyen Vinh P.
LandOfFree
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