Blowing port for clean air of an apparatus for washing semicondu

Details Blowing port for clean air of an apparatus for washing semicondu Blowing port for clean air of an apparatus for washing semicondu

1990-10-31

1994-11-08

Joyce, Harold

Ventilation

Workstation ventilator

Having inlet airway

454190, F24F 900

Patent

active

053622740

ABSTRACT:
A blowing port of an apparatus for washing semiconductor materials, has a plurality of passages defined within the duct of the blowing port. At least the upper portion of each passage is formed convergently to its end. The end of each passage of the blowing port forms a transverse slit so as to form laminar flow of clean air flowing substantially horizontally from the blowing port to an opposite suction port. Such laminar air flow covers the respective washing tanks, and thus it prevents vapor generated in chemical washing tanks from entering final washing tanks. Accordingly semiconductor materials washed in final washing tank or tanks are not badly influenced with the described vapor.

REFERENCES:
patent: 2544769 (1951-03-01), Sperry et al.
patent: 3203337 (1965-08-01), Beckwith
patent: 3543532 (1970-12-01), Gatton et al.
patent: 3726203 (1973-04-01), Lindestron
patent: 3771323 (1973-11-01), Simons et al.
patent: 4883542 (1989-11-01), Voneff

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