Blowing door for ultra-clean confinement container

Details Blowing door for ultra-clean confinement container Blowing door for ultra-clean confinement container

1991-02-28

1992-05-12

Joyce, Harold

Ventilation

Means combined with door

414217, 454370, B65G 6900

Patent

active

051122774

ABSTRACT:
The blowing door permits the passage of an object (6) from the interior of a first container (5) to a second container (4) without the respective atmospheres of the interior of these two containers being polluted.
The blowing door (2) comprises a pressurized fluid inlet (17), an inner chamber (15) and at least one of its faces is ventilated by means of filter (14) placed between the face (11) and the inner chamber (15). During the opening of the door (2), the face (11) in contact with the external atmosphere is then ventilated, so that polluting particles are not brought into the containers (4, 5) during the closure of the door (2).
Application to the treatment of silicon wafers or chips to be used in microelectronics.

REFERENCES:
patent: 4278380 (1981-07-01), Guarino
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4851018 (1989-07-01), Lazzari et al.

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