Block and graft copolymers as adhesion promoters

Details Block and graft copolymers as adhesion promoters Block and graft copolymers as adhesion promoters

1993-03-11

1995-01-24

Kight, III, John

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428331, 428334, B32B 2704

Patent

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053841921

ABSTRACT:
A structure comprising an inorganic oxide substrate having thereon an organic polymer layer, characterized in that interposed between the substrate and the organic polymer layer there is an adhesion promoting layer of a block or graft copolymer, one component of which is compatible with the organic polymer and a second of which is a poly(vinyl phenol) component that is capable of hydrogen bonding with the inorganic oxide substrate is disclosed. In preferred embodiments, the substrate is a semiconductor material and the adhesion promoter facilitates the adhesion of a photoresist or protective coating.

REFERENCES:
patent: 4880487 (1989-11-01), Sheehan et al.
patent: 5225267 (1993-07-01), Ochi et al.
K. Cho et al, Journal of Polymer Science: Part B: Polymer Physics, vol. 28, (1990) pp. 1699-1718.
H. R. Brown, Macromolecules, vol. 22, (1989), p. 2859.

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