Blind devices and methods for providing continuous...

Details Blind devices and methods for providing continuous... Blind devices and methods for providing continuous...

2005-11-04

2009-06-30

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S067000, C355S071000, C378S034000, C250S492200

Reexamination Certificate

active

07554648

ABSTRACT:
Blind devices and related methods for lithography systems are described. An exemplary system has a vacuum chamber with first and second chamber portions. In a member between the chambers is defined an exposure aperture, relative to which a reticle stage in the first chamber portion moves a reticle. A gas enters the first chamber portion and establishes a thermophoretic condition relative to the reticle or portion thereof. A fixed-blind-aperture assembly, movable relative to the exposure aperture and the reticle to exposure and non-exposure positions, defines an illumination aperture through which light from the second chamber portion and gas from the first chamber portion pass when the fixed-blind-aperture assembly is in the exposure position. A gas-passage aperture in the member conducts the gas, passing through the illumination aperture, from the first chamber portion to the second chamber portion when the fixed-blind-aperture assembly is in the non-exposure position.

REFERENCES:
patent: 6153044 (2000-11-01), Klebanoff et al.
patent: 6253464 (2001-07-01), Klebanoff et al.
patent: 7030959 (2006-04-01), Sogard
Rader et al., “Verification Studies of Thermophoretic Protection for EUV Masks,”Proceedings SPIE4688:182-193, 2002.

Affiliated with

Also associated with

Rating

Blind devices and methods for providing continuous... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Blind devices and methods for providing continuous..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Blind devices and methods for providing continuous... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4116663