Blend of solvent and arylsiloxane interlayer dielectric material

Details Blend of solvent and arylsiloxane interlayer dielectric material Blend of solvent and arylsiloxane interlayer dielectric material

1987-07-02

1988-07-19

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

524484, 524588, 528 43, 10628712, 10628713, 10628715, C08K 501

Patent

active

047586206

ABSTRACT:
Striation-free interlayer dielectric films of good reflectivity are formed by spin-coating a solution comprising 1,2,4-trimethylbenzene solvent containing a dissolved arylsiloxane oligomer or polymer capable of forming an interlayer dielectric film.

REFERENCES:
patent: 4349609 (1982-09-01), Takeda et al.
patent: 4600685 (1986-07-01), Kitakohji et al.
patent: 4663414 (1987-05-01), Estes et al.
Hackh's Chemical Dictionary, 4th edition, 1972, p. 473.

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