Bleachable materials for lithography

Details Bleachable materials for lithography Bleachable materials for lithography

2011-01-25

2011-01-25

Walke, Amanda C. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Erasable imaging

C430S270100, C430S273100, C430S905000, C430S945000

Reexamination Certificate

active

07875408

ABSTRACT:
Compositions comprising photobleachable organic materials can be bleached by 193 nm light, and brought back to their original state by stimuli after exposure. (reversible photobleaching). We use these compositions in art-known contrast enhancement layers and as a part of a photoresist, especially in optical lithography processes for semiconductor fabrication. They may comprise polymers such as organo-silicon polymers, polymers comprising polymers of aromatic hydroxyl compounds such as phenol and naphthol such as phenol formaldehyde polymers and naphthol formaldehyde polymers styrene polymers and phenolic acrylate polymers or cyclic materials comprising:where the radicals “R” and “Y” represent organo, or substituted organo moieties, Structures I, II, and III represent basic organic skeletons and can be unsubstituted or substituted in any available position with any one or combinations of multiple substituents.

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