Blanket tungsten deposition

Details Blanket tungsten deposition Blanket tungsten deposition

1994-11-07

1995-07-25

Quach, T. N.

Fishing, trapping, and vermin destroying

118720, 427124, 4271261, 4272551, 437200, 437246, H01L 21285

Patent

active

054362008

ABSTRACT:
A blanket tungsten deposition apparatus comprises a reactor the inside of which is evacuatable, a gas inlet means for introducing a reaction gas into the reactor, mount means for mounting an object substrate to be treated, penetration-preventing means for preventing penetration of gas, disposed to cover a peripheral portion of a surface of the object substrate to be treated and having an inner diameter smaller than a diameter of the object substrate and an outer perimeter larger than that of the object substrate, and another gas inlet means for introducing a gas to a space on the periphery of the object substrate covered by the penetration-preventing means. Growth of W film on a peripheral SiO.sub.2 portion of substrate is prevented and hence production of particles caused by peeling-off of W film is prevented.

REFERENCES:
patent: 4902645 (1990-02-01), Ohba
patent: 5252132 (1993-10-01), Oda et al.
patent: 5328722 (1994-07-01), Ghanayem et al.
patent: 5332691 (1994-07-01), Kinoshita et al.

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