Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1997-04-22
1999-07-13
Nguyen, Nam
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
20429823, C23C 1434
Patent
active
059221810
ABSTRACT:
It is an object of the present invention is to provide a color liquid crystal display depicting clear images on the screen by decreasing the reflectance of external light such as solar light and room light on the black matrix. A black matrix including a laminated film is provided. The laminated film includes at least two layers each of which include at least two constituent elements. One layer is a transition layer in which the content of one of the constituent elements increases along an incident direction of external light. Also provided is a reactive sputtering apparatus suitable for preparing the laminated film for the black matrix of the present invention.
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patent: 5108571 (1992-04-01), Ludwig et al.
patent: 5427665 (1995-06-01), Hartig et al.
Anelva Corporation
Nguyen Nam
Ver Steeg Steven H.
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