Black-body wafer support fixture for exposure of photoresist

Details Black-body wafer support fixture for exposure of photoresist Black-body wafer support fixture for exposure of photoresist

1975-11-17

1977-09-06

Griffin, Donald A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 77, 355113, 427 43, G03B 2752, G03B 2732, G03B 2704

Patent

active

040464741

ABSTRACT:
Photoresist coated transparent structures are supported in a black body (reflectionless) holder during activating exposure of the photoresist. When the photoresist coated structure is positioned in the holder, there is no reflecting surface close enough to the photoresist coated structure for photoresist-activating radiation which has once passed through the structure to be reflected back into the photoresist with sufficient intensity to expose the photoresist.

REFERENCES:
patent: 1564821 (1925-12-01), Bornmann
patent: 2155149 (1939-04-01), Rutherford
patent: 2866704 (1958-12-01), Korkosz et al.
patent: 3476476 (1969-11-01), Chitayat
patent: 3620833 (1971-11-01), Gleim et al.
patent: 3802102 (1974-04-01), Licciardi
patent: 3844655 (1974-10-01), Johannsmeier
patent: 3888673 (1975-06-01), Suzuki et al.

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