Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate
2006-07-04
2006-07-04
Hassanzadeh, Parviz (Department: 1763)
Etching a substrate: processes
Forming or treating optical article
C216S002000
Reexamination Certificate
active
07070699
ABSTRACT:
A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.
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German Kristine A.
Gulvin Peter M.
Kubby Joel A.
Ma Jun
Yang Fuqian
Culbert Roberts
Hassanzadeh Parviz
Xerox Corporation
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