Bisneopentyl alkyl organometallic compounds and methods of prepa

Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing

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C07F 500

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047105755

ABSTRACT:
In the manufacture of semiconductors it is desirable to make controlled deposits of certain phosphides or arsenides of trivalent metals such as gallium and indium. There are provided novel alkyl bisneopentyl derivatives of these metals whose stability and volatility characteristics makes them ideally suited for the above purpose.

REFERENCES:
patent: 4101568 (1978-07-01), Malpass et al.
patent: 4148756 (1979-04-01), Langer, Jr.
patent: 4170604 (1979-10-01), Malpass et al.
Chemical Abstracts 91, 20201h (1979).
Chemical Abstracts 65, 3994e (1966).
Mole et al., Organoaluminum Compounds, Elsevier Publ. Co., N.Y., pp. 54, 88 & 89 (1972).
Nesmeyanov et al., Methods of Elements--Organic Chem., North Holland Publ. Co., Amsterdam, vol. 1, pp. 386-387, 506, 507, 526-528, 398 and 450 (1967).

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